The Thin Film Laboratory houses two load-locked high vacuum deposition systems that are used in studies of thin film deposition by reactive magnetron sputtering and plasma enhanced chemical vapor deposition.  Recent work of Jim Doyle and his students has focused on semiconductor materials used in thin film solar cells.  Diagnostic apparatus available in the Thin Film Lab include a stylus profilometer, single wavelength ellipsometry, four-point probe resistivity, photoconductivity, and optical transmission.

VThin Film Lab