Thin Film Lab
The Thin Film Laboratory houses two load-locked high
vacuum deposition systems that are used in studies of thin film
deposition by reactive magnetron sputtering and plasma enhanced
chemical vapor deposition. Recent work of Jim Doyle and his
students has focused on semiconductor materials used in thin film solar
cells. Diagnostic apparatus available in the Thin Film Lab
include a stylus profilometer, single wavelength ellipsometry,
four-point probe resistivity, photoconductivity, and optical
transmission.